· 10 ~ 2,000 SCMH (5.9 ~ 1,177SCFM)
· N2 PURITY : 99 ~ 99.999%
· 10 ~ 2,000 SCMH (5.9 ~ 1,177SCFM)
· N2 PURITY : 95 ~ 99%
· 10 ~ 5,000 SCMH (5.9 ~ 2,943SCFM)
· N2 PURITY : 99.9 to 99.9999%